±38μm ·8" Wafer
The RX2000SP3 supports film-to-film, tray-to-tray, tray-to-film, and film-to-tray sorting modes. It handles panel wafers, multi-bin wafer map sorting, and adapts to diverse production requirements.
RX2000 series: 100+ systems shipped, 10+ years production-proven, serving 30+ customers
InP, GaAs, GaN, SiC high-value specialty chip sorting
Optimized processes for compound semiconductors and wide bandgap materials
Optimized for large, thin, small and fragile dies
Custom nozzle tooling
Custom ejector pin solutions
Custom network protocol
Barcode scanner & CCD recognition
1D/2D code recognition
Wafer mapping (TXT format)
Map read / parse / save
Force range: 30–220g
Force accuracy: ±10g
Vacuum die detection
Max 8" wafer (ring / sub-ring options)
Waffle/Gel-pak: 2"×4 / 4"×2
Wafer de-static: ionizer
| 参数项 | RX2000 SP3 Standard |
|---|---|
| XY Placement Accuracy | ±38μm |
| Angular Accuracy | ±3° |
| UPH | Max 4K Max 2K (AOI enabled) |
| Supported Die Size(Sample validation for out-of-range) | L×W: 0.25–7mmT: 100–500μm |
| Supported Wafer Size | Max 8" (Wafer frame/grip ring) |
| Supported Waffle/Gel-Pak Size | 2"×4 / 4"×2 (optional) |
| Bond Force Range | 30–220g |
| Bond Force Accuracy | ±10g |
| Wafer De-Static | Ionizer |
| Ink Dot Detection | Supported |
| Pre-Bond Inspection | Supported |
| Wafer Map | Supported (TXT format, map read/parse/save) |
| Miss Die Detection | Vacuum detection |
| Weight | 1,000 kg |
| Dimensions W×D×H | 1,100×1,450×1,600 mm (excl. signal tower) |
Transfer die from wafer film to wafer film(on wafer frame or wafer expander/grip ring)
Transfer die from chip box to chip box(waffle pack or gel-pak)
Transfer die from wafer film to chip box
Transfer die from chip box to wafer film
Sort different projects and grades dies from a single wafer into different carriers based on wafer mapping
Sort different bin-grade dies from source film to new wafer film or waffle packs based on wafer map
Custom position and pattern placement for non-standard process requirements
RX2000 covers IC, optical communications, power semiconductors, RF, and MEMS applications
QFP / BGA / LGA / QFN traditional packages
GPU / NPU / HBM high-performance computing
IMU, pressure sensors, micromirrors, MEMS devices
MMIC / PA / LNA microwave RF devices
VCSEL / EML / silicon photonics high-precision sorting
Flexible config from R&D to pilot to volume production
ACCURACY provides full technical support from process evaluation through production, with modular configuration to meet diverse production needs.
Submit die specs, carrier types, throughput targets. Our team delivers a feasibility report and recommended configuration (accuracy, force control, cleanroom level, handling).
Run your actual dies at our demo center. We provide complete sorting reports with process recommendations. Free sample trials available.
Full system commissioning, on-site training. One operator can master the system. Standard delivery within 45 days.
8-hour response + 48-hour on-site in China. Continuous process optimization and fast spare parts supply.
我们的技术团队将根据您的具体需求,提供定制化解决方案和详细技术资料