±3μm Accuracy · Multi-Process Platform · Purpose-Built for SiP Multi-Chip Bonding
ZX2200 evo adv — ACCURACY's latest SiP multi-chip high-precision die bonder with ±3μm accuracy. Designed for optical, microwave/RF, LiDAR, and MEMS packaging.
Modular architecture supports wafer, waffle, and gel pack feeds, and processes dispensing, stamping, and flip-chip bonding — enabling multi-process flexibility and fast changeover in one machine.
ZX2200 is in stable production at leading manufacturers in optical communications, RF, LiDAR, and MEMS sectors
High-precision positioning algorithm with intelligent thermal drift compensation
±3μm repeatable placement accuracy
CPK ≥ 1.33 with look-up correction
Production-ready for demanding SiP applications
Independent dispenser / bond-head integrated dispenser
Independent stamping / bond-head integrated stamping
Contact / laser height measurement
Flip chip / flux / pneumatic dispensing / auger valve
Pin transfer
Modular design for rapid process expansion
12-nozzle auto tool change
Stamping tool changeover
5-pin auto ejector switch
One-click changeover for 1,000+ recipes
Custom nozzle tooling for non-standard die shapes
Multi-segment ejector pin / force-optimized profiles
Extra-long and ultra-thin die handling
Deep-cavity pick with clearance control
Per-die traceability management
Wafer MAP and substrate MAP support
Barcode / 2D code recognition
Customizable network protocol · MES integration ready
Automatic load / unload cycling
8" – 12" wafer cassette auto-loader
Inline track interface
Static waffle pack / gel-pak feed
| 参数项 | ZX2200 | ZX2200 plus | ZX2200 evo adv |
|---|---|---|---|
| XY Placement Accuracy | ±10μm | ±7μm | ±3μm |
| UPH | ≥ 1200 | ≥750 | ≥500 |
| Angular Placement Accuracy | ±0.25° | ±0.15° | ±0.15° |
| Standard Condition | Look-up single-pass (no transfer), post-bond inspection(Std: 2×2×0.2mm die, single die surface mount, 432 pads, look-up/look-down center offset < ±2μm) | Transfer station, post-bond inspection(Std: 2×2×0.2mm die, single die surface mount, 432 pads, look-up/look-down center offset < ±2μm) | Transfer station, post-bond inspection(Std: 2×2×0.2mm die, single die surface mount, 432 pads, look-up/look-down center offset < ±2μm) |
| Bond Force | 50g – 400g (50–100g: ±5g; 101–400g: ±5%)Custom option: 10–150g ±3g | 50g – 400g (50–100g: ±5g; 101–400g: ±5%)Custom option: 10–150g ±3g | 50g – 400g (50–100g: ±5g; 101–400g: ±5%)Custom option: 10–150g ±3g |
| Supported Die Size | L×W: 0.15–35mm, T: 0.2–2.5mm(L or W < 0.5mm or > 10mm, T < 0.2mm: custom validation required) | L×W: 0.15–35mm, T: 0.2–2.5mm(L or W < 0.5mm or > 10mm, T < 0.2mm: custom validation required) | L×W: 0.15–35mm, T: 0.2–2.5mm(L or W < 0.5mm or > 10mm, T < 0.2mm: custom validation required) |
| Supported Substrate Size | L: 300mm, W: 55–200mm, T: < 12mmCavity depth: 8mm (> 8mm: custom validation) | L: 300mm, W: 55–200mm, T: < 12mmCavity depth: 8mm (> 8mm: custom validation) | L: 300mm, W: 55–200mm, T: < 12mmCavity depth: 8mm (> 8mm: custom validation) |
| Supported Wafer Size | 8" – 12" | 8" – 12" | 8" – 12" |
| Waffle Pack / Gel-Pak Size | 2" and 4" | 2" and 4" | 2" and 4" |
| Machine Dimensions W×D×H (mm) | 2200×1700×1800 (excl. signal tower) | 2200×1700×1800 (excl. signal tower) | 2200×1700×1800 (excl. signal tower) |
| Machine Weight | 1500 kg | 1500 kg | 1500 kg |
Compatible with QFP/BGA/LGA and other package types. Supports both dispensing and stamping adhesive application methods.
Supports C4 bump and Cu Pillar flip-chip interconnect for FC-BGA/FC-CSP advanced packaging. Available with flux or standalone flip placement.
High-precision adhesive transfer for miniaturized die including GaAs and other compound semiconductors. Precise epoxy volume control for small-geometry applications.
Optional integrated UV curing module for in-situ curing immediately after dispensing.
Integrated heated substrate stage supporting up to 200°C. Suitable for heated bonding processes requiring DAF adhesive.
ZX2200 serves six key application segments: optical communications, RF, LiDAR, MEMS, consumer electronics, and memory
Multi-format TO/BOX/COB/COC packages. Laser diode, detector & passive component placement with epoxy dispensing & stamping.
High-density multi-chip placement for military & commercial RF kovar packages. Deep-cavity pick & 45° tilt bonding.
VCSEL & photodetector assembly. 99.8% yield for 100μm thin die with programmable soft-landing force control.
Pressure, capacitive & medical MEMS sensor module bonding. Soft-landing pick for fragile die, 10KK+ throughput.
Flexible packaging line: 1,000+ recipes, 10-min changeover, high-mix low-volume capability.
Flexible process & feed options. Scalable design supporting smooth ramp from R&D to pilot to volume production.
ACCURACY provides full technical support from process evaluation through volume production, ensuring rapid line integration.
Submit die/substrate specs, throughput targets, and process requirements. Our engineering team delivers a feasibility report and recommended configuration.
Run your actual dies and substrates at our demo center. We provide a complete placement accuracy report and validation results against your process requirements.
Full system commissioning, on-site process training, and operator qualification. One operator can master the system; supports pilot lot validation and production ramp.
8-hour remote response + 48-hour on-site support within mainland China. Continuous process optimization recommendations and fast spare parts supply.
我们的技术团队将根据您的具体需求,提供定制化解决方案和详细技术资料